MEMS DEVICE AND MEMS DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a MEMS device and a MEMS device manufacturing method, which can prevent deformation or breakage of a substrate side due to thermal expansion and shrinkage of a through electrode.SOLUTION: A MEMS device 100 includes an element part 120 which is provided on a substrate 110 and has a movable part 121; a joining part 150 which is provided on the substrate 110 to surround the element part 120; and a lid part 160 with a part of a substrate side surface 160a being joined to the joining part 150 to form an internal space 170 including the element part 120. The lid part has a through electrode which pierces the lid part, and a connection electrode which is formed on the substrate side surface at a portion joined to the joining part and which is electrically connected with the through electrode. The joining part has a space for exposing a part of the connection electrode at a portion overlapping the through electrode in plan view.SELECTED DRAWING: Figure 1