| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal oscillator capable of forming metal wiring and a crystal piece in the same shape while accurately aligning them, suppressing frequency variations and performing accurate dimension measurement, and the crystal oscillator.SOLUTION: The present invention relates to a manufacturing method of a crystal oscillator of contour oscillation, and the crystal oscillator. The manufacturing method of the crystal oscillator and the crystal oscillator are characterized in that metal films of wiring metals are formed on a front side and a rear side of a crystal substrate, expansion metal patterns 23 larger than a predetermined shape of the crystal piece are formed by etching the metal films on the front side and the rear side, a crystal resist pattern 3 for cutting out the crystal piece in the predetermined shape is formed on the expansion metal pattern 23 on the front side, metal wiring on the front side, the crystal piece and the metal wiring on the rear side are formed by simultaneously performing dry etching on the expansion metal pattern 23 on the front side, the crystal substrate and the expansion metal pattern 23 on the rear side while using the crystal resist pattern 3 as a mask.SELECTED DRAWING: Figure 3 |
