| 摘要 |
PROBLEM TO BE SOLVED: To provide a hand capable of supporting as stably as possible a wafer with circuits formed on both sides.SOLUTION: A hand 101 for supporting a wafer W includes: a fixed part 1 which is fixed in a distal end of an arm of a carrier robot; and a first support part 2 and a second support part 3 which extend from the fixed part 1 toward the same direction and on which the wafer W is placed. The first support part 2 includes: a first side end supporting part 22 which is positioned in a lower part of one side end portion of the placed wafer W; and a first distal end supporting part 23 which is positioned in a lower part of a distal end portion of the wafer W. The second support part 3 includes: a second side end supporting part 32 which is positioned in a lower part of another side end portion of the placed wafer W; and a second distal end supporting part 33 which is positioned in the lower part of the distal end portion of the wafer W. A buffering member 21a or the like is disposed on the first distal end supporting part 23 and the second distal end supporting part 33 inside of the side end portion of the placed wafer W and on surfaces of the first side end supporting part 22 and the second side end supporting part 32 at a side where the wafer W is placed.SELECTED DRAWING: Figure 2 |
