| 摘要 |
PROBLEM TO BE SOLVED: To provide a specimen holder capable of improving detection sensitivity when detecting signals generated from a specimen by irradiating the specimen with electron beams.SOLUTION: Disclosed is a specimen holder 100 for introducing a specimen S into a specimen chamber of an electron microscope in an electron microscope which is equipped with a detector located closer to a first direction side than the specimen S and detecting signals generated from the specimen S by irradiation of electron beams. The specimen holder includes: a shaft part; a frame 130 provided at the tip of the shaft part; and a specimen holding part 120 surrounded by the frame 130. The specimen holding part 120 holds the specimen S so that the edge in a first direction of the specimen S is exposed when introduced into the specimen chamber.SELECTED DRAWING: Figure 3 |
