METHOD OF CORRECTING ERROR IN POSITION MEASURING DEVICES

摘要

PROBLEM TO BE SOLVED: To provide a method that places the least demands on a memory capacity of an accompanying signal processing unit with respect to a correction table to be used in a method of correcting an error in a position measurement device.SOLUTION: The present invention relates to a method of correcting errors in a position measurement system including a reference unit which is scanned by at least one scanning unit. Respective correction values are made available for the prescribed number of correction points on the reference unit, and the correction values are obtained in calibration to be implemented prior to measurement. In a measurement mode, a detected position value is used for correction. The correction value obtained in the calibration is compressed for the measurement mode.SELECTED DRAWING: Figure 1