| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element which is adaptive to downsizing and reduction in height, suppresses distortion in a contour of the piezoelectric element and also improves production efficiency, and a piezoelectric device employing the piezoelectric element.SOLUTION: A manufacturing method of a crystal element includes: a crystal element group formation step of forming a pattern comprised of a metal film M in which a number of crystal element regions 24 in a rectangular shape in a planar view are aligned in a matrix shape on front and rear principal surfaces of a crystal wafer 200; a groove formation step of forming a groove G1 relatively to a boundary line BL1; an etching step of performing etching after the groove formation step to make a central part on a principal surface of each of the crystal element regions thin to predetermined thickness, simultaneously penetrating the groove G1 and making a region of a boundary line BL2 thin, thereby forming a bridge part; and a division step of folding away the bridge part, thereby the wafer into individual crystal elements.SELECTED DRAWING: Figure 13 |
