METHOD FOR FORMING RESIN PATTERN, METHOD FOR FORMING PATTERN, CURED FILM, LIQUID CRYSTAL DISPLAY DEVICE, ORGANIC EL DISPLAY DEVICE, AND TOUCH PANEL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a resin pattern having high sensitivity and resolution and inhibiting generation of a residue, a method for forming a pattern, a cured film obtained from the resin pattern, and a liquid crystal display device, an organic EL display device and a touch panel display device including a pattern or a cured film obtained by the above pattern method.SOLUTION: A method for forming a resin pattern includes in the following order: an application step of applying a specific photosensitive resin composition on a substrate having a reflectance of 20% or more at a wavelength of 313 nm as a step 1; a drying step of forming a photosensitive resin composition layer as a step 2; an exposure step of exposing the layer along a pattern by using specific light radiated from an annular illumination device as a step 3; and a development step of developing the exposed photosensitive resin composition layer as a step 4.SELECTED DRAWING: Figure 1