OBSERVATION SYSTEM OF SCANNING ELECTRON MICROSCOPIC IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a technique that enables observation of a biological sample with high resolution and high contrast by using a scanning electron microscope while the biological sample is alive.SOLUTION: A sample holder for a scanning electron microscope used in an observation system of a scanning electron microscopic image has an insulation thin film 203 having one principal surface serving as a holding face for an observation sample, and an electrically conductive thin film 201 laminated on the other principal surface of the insulation thin film 203. The one principal surface side of the insulation thin film 203 is provided with a signal detector 210 for detecting a signal based on the potential of the one principal surface of the insulation thin film 201 which occurs due to an electron beam 52 incident from the electrically conductive thin film 201 side. A sample stage 20 for the scanning electron microscope used in the observation system of the scanning electron microscopic image contains a circuit unit (amplifier 21 in this case) for amplifying a detection signal detected by the signal detector 210 provided to the sample holder 10 and outputting the amplified detection signal as a measurement signal.SELECTED DRAWING: Figure 2