INSPECTION APPARATUS, INSPECTION PROGRAM, AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To suppress fluctuation of the period until start of the measurement and to suppress reduction of a measurement accuracy.SOLUTION: An inspection apparatus includes: a rotation mechanism rotating a holder for holding an inspection chip with a main shaft as a center; a position detection part for detecting a position of the holder rotated by the rotation mechanism; a light emission part for emitting measurement light; a light reception part for receiving transmission light in which measurement light emitted by the light emission part transmits the inspection chip held by the inspection chip; and a control part for controlling the rotation by the rotation mechanism. The control part causes the holder stopped at an arbitrary position to rotate from the position detected by the position detection part to the measurement position capable of transmitting the inspection chip held by the holder, and starts the measurement on the basis of the transmission light received by the light reception part after the prescribed period.SELECTED DRAWING: Figure 6