CORRECTION METHOD OF MEMBER FOR MANUFACTURING WIRE GRID POLARIZER, METHOD FOR MANUFACTURING WIRE GRID POLARIZER, AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an easy and suitable correction method of a member to be used for manufacturing a wire grid polarizer, a method for manufacturing a wire grid polarizer for suppressing generation of a white (void) defect, and an exposure method using the wire grid polarizer.SOLUTION: The method for manufacturing a wire grid polarizer includes steps of: forming a resist pattern on a grid material layer of a transparent substrate having the grid material layer on one surface; and etching the grid material layer by using the resist pattern as an etching mask to form an opening to manufacture a wire grid. When a defective portion is present in a member for forming the resist pattern in the above method, the member is corrected through the following steps: an appearance inspection step of determining a defect type and specifying a defective portion; and a defect correction step of eliminating a pattern in a desired region including the defective portion where correction is required.SELECTED DRAWING: Figure 8