发明名称 EXPANSION DEVICE, AND BREAKING METHOD FOR ADHESIVE SHEET
摘要 PROBLEM TO BE SOLVED: To provide an expansion device capable of applying an appropriate external force to a workpiece.SOLUTION: An expansion device includes: first holding means (14) and second holding means (24) which face each other while interposing a workpiece (11) therebetween in a first direction (D1) that is parallel to a first surface (11a) of the workpiece and hold an expand sheet (13) therebetween; third holding means (34) and fourth holding means (44) which face each other while interposing the workpiece therebetween in a second direction (D2) parallel to the first surface and orthogonal to the first direction and hold the expand sheet therebetween; moving means (12, 22, 32 and 42) for separating the first holding means and the second holding means from each other in the first direction and separating the third holding means and the fourth holding means from each other in the second direction; and expansion cancel member attaching/detaching means (50) for sticking a tabular expansion cancel member (60) to the expand sheet between the holding means and the workpiece or exfoliating the expansion cancel member from the expand sheet.SELECTED DRAWING: Figure 1
申请公布号 JP2016072437(A) 申请公布日期 2016.05.09
申请号 JP20140200577 申请日期 2014.09.30
申请人 DISCO ABRASIVE SYST LTD 发明人 TAKAZAWA TORU
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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