| 摘要 |
PROBLEM TO BE SOLVED: To provide an oriented carbon nanotube aggregate production apparatus that enables easy adjustment of a distance between an injection part and a catalyst substrate in a furnace.SOLUTION: An oriented carbon nanotube aggregate production apparatus which grows an oriented carbon nanotube aggregate on a substrate carrying a catalyst on a surface thereof comprises: a furnace into which the substrate carrying the catalyst is carried; a mounting part which is installed inside the furnace and on which the substrate carrying the catalyst is mounted, or a transport part that transports the substrate carrying the catalyst from a carry-in port to a carry-out port; an injection part that injects gas into the furnace; and a displacement mechanism that can change a distance between the injection part and the substrate carrying the catalyst on the mounting part or the transport part by changing an arrangement position of at least one of the mounting part or the transport part, and the injection part.SELECTED DRAWING: Figure 1 |
