| 摘要 |
PROBLEM TO BE SOLVED: To provide a review device capable of maintaining a displacement between a coordinate device of a sample and a coordinate device of the review device within a certain range while maintaining the throughput of an automatic defect review (ADR).SOLUTION: The review device stores a positional displacement between a coordinate of defect from an inspection equipment and a coordinate of the actually detected defect during observing to predict a displacement amount in the following defect observation. When the predict displacement amount is out of an observation area, the review device performs a wafer alignment.SELECTED DRAWING: Figure 3 |
