| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is adequately applicable to even a use under a high-temperature condition.SOLUTION: An electrostatic chuck 1 comprises: a metal base 12 having a base surface 121 and a base backside 122; a ceramic main body substrate 11 disposed on the side of the base surface 121 of the metal base 12; an attracting electrode 21 provided in the main body substrate 11; a heater 41 provided in the main body substrate 11; and an adhesion layer 13 disposed between the metal base 12 and the main body substrate 11. The main body substrate 11 includes a heat insulation layer 51 disposed on the side of the metal base 12 with respect to the heater 41. The heat insulation layer 51 is provided with a plurality of fine spaces 511 which are spaced apart from each other by a predetermined distance in a common plane.SELECTED DRAWING: Figure 1 |
