| 摘要 |
PROBLEM TO BE SOLVED: To realize further improvement of accuracy of laser processing by a laser beam machine.SOLUTION: A laser beam machine equipped with: a support body for supporting a work-piece; a laser beam irradiation device which radiates laser beam towards the work-piece supported by the support body; and a control part. The control part detects positions of plural alignment marks which are given onto the work-piece with reference to an image of the work-piece supported by the support body which is picked up by a camera sensor, obtains an error between a position at which each alignment mark should exist normally and a position at which each alignment mark is actually detected, calculates an error of a virtual position in a place between a certain alignment mark and other alignment marks by utilization of positional error of each alignment mark, and then, determines a correction amount of a command to be given to the laser beam irradiation device in order to radiate laser beam to a desired target irradiation position on the work-piece when laser processing on the basis of those positional errors.SELECTED DRAWING: Figure 7 |
