SILANOL COMPOUND REMOVAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a silanol compound removal device capable of efficiently removing a silanol compound in a fluid.SOLUTION: A silanol compound removal device includes: a chemical filter for removing a silanol compound using an inorganic silica-based porous material where the pH value of a water mixture (content ratio:5 wt.%) obtained by being mixed with pure water is 7 or less as an adsorbent; and a chemical filter for removing an inhibitor being disposed at the upstream of the chemical filter for removing the silanol compound and removing the inhibitor reducing the silanol compound removal capability of the chemical filter for removing the silanol compound.SELECTED DRAWING: None