INNER LAYER MEASUREMENT METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an inner layer measurement apparatus and method with higher space resolution than the prior art.SOLUTION: The inner layer measurement method for measuring an XY cross section of a translucent body which reflects a beam of light at a surface and an inner layer by means of an optical interferometer, includes the steps of: measuring a first XY cross section of the translucent body by irradiating a first irradiation light; and measuring a second XY cross section which is positioned at inner layer than the first XY cross section by irradiating a second irradiation light which has the peak wavelength at longer-wavelength side than the first irradiation light.SELECTED DRAWING: Figure 1