| 摘要 |
Provided is a method for manufacturing a microsensor body, comprising the following steps: S1: a substrate (10) is coated with a wetting colloidal material to form a colloid layer (20); a layer of one-dimensional nanowire film (30) covers the surface of the colloid layer (20), forming a sensor blank; S2: the colloid layer (20) of the sensor blank is dried, causing the colloid layer (20) to crack and form a plurality of colloid islands (21); one part of the one-dimensional nanowire film (30) contracts to form a contracted film (32) adhering to the surface of the colloid islands (21); the other part stretches to form a connection structure (33) connected between adjacent contracted films (32). Also provided is a microsensor body, comprising a substrate (10), a plurality of colloid islands (21) attached to the substrate (10), and a plurality of trigger networks (31) attached to the plurality of colloid islands (21); the trigger networks (31) comprise a plurality of contracted films (32) adhering to the surfaces of the colloid islands (21), and a connection structure (33) connected between adjacent contracted films (32). Also provided is a microsensor comprising the described microsensor body. In the sensor body, the contracted film and connection structure are formed by stretching a one-dimensional nanowire film; the connection between the contracted film and the connection structure is very stable, improving sensor component stability; a cracking method is used, making it easy to obtain a sensor body having a large-scale stably suspended connection structure array. |
