RARE EARTH THIN-FILM MAGNET AND METHOD FOR PRODUCING SAME

摘要

A rare earth thin-film magnet which is composed of an Nd-Fe-B film formed on an Si substrate, and which is characterized in that: if the film thickness of the rare earth thin film is 70 μm or less, the Nd content satisfies conditional expression 0.15 ≤ Nd/(Nd + Fe) ≤ 0.25 in terms of an atomic ratio; if the film thickness of the rare earth thin film is 70-115 μm (excluding 70 μm), the Nd content satisfies conditional expression 0.18 ≤ Nd/(Nd + Fe) ≤ 0.25 in terms of an atomic ratio; and if the film thickness of the rare earth thin film is 115-160 μm (excluding 115 μm), the Nd content satisfies conditional expression 0.20 ≤ Nd/(Nd + Fe) ≤ 0.25 in terms of an atomic ratio. The present invention addresses the problem of providing: a rare earth thin-film magnet which has a maximum film thickness of 160 μm and is free from separation of a film or breakage of a substrate; and a method for producing a rare earth thin-film magnet, by which the thin film is able to be stably formed.