SYSTEMS AND METHODS FOR CONFORMING DEVICE TESTERS TO INTEGRATED CIRCUIT DEVICE WITH PRESSURE RELIEF VALVE
摘要
The present invention relates to systems and methods for preventing over pressurization in a fluid management system used in an integrated circuit (IC) device tester. The prevention of the over pressurization in the fluid management system is based on the use of a pressure relief valve coupled to the fluid management system.
申请公布号
WO2016069800(A1)
申请公布日期
2016.05.06
申请号
WO2015US57896
申请日期
2015.10.28
申请人
ESSAI, INC.
发明人
BARABI, NASSER;HO, CHEE, WAH;TIENZO, JOVEN, R.;KRYACHEK, OKSANA;NAZAROV, ELENA, V.