| 摘要 |
The purpose of the present invention is to greatly reduce background noises and improve the efficiency of the generation of near-field light in a scanning probe microscope. A scanning probe microscope is equipped with: a measurement probe for scanning over and in relation to a sample to be inspected; an exciting light irradiation system; a (near-field light for excitation)-generating system for irradiating an area including the measurement probe with exciting light from the exciting light irradiation system to generate near-field light for excitation in the area; and a scattered light detection system for detecting scattered light of near-field light for measurement which is generated between the measurement probe and the sample by the action of the near-field light for excitation. |
