| 摘要 |
A fire chamber of the present invention comprises: a hollow fire chamber body that has a plasma ignition region; a gas flow channel connected to the plasma ignition region and a plasma discharge channel of a plasma chamber; and an ignition plasma source that ignites plasma in the plasma ignition region, wherein a plasma gas is supplied from the plasma ignition region to the plasma discharge channel through the gas flow channel after the ignition of the plasma in the plasma ignition region so that plasma is generated in the plasma chamber. After plasma is ignited in the plasma ignition region of the fire chamber, a plasma gas is supplied from the plasma ignition region to the plasma discharge channel through the gas flow channel so that plasma is generated in the plasma chamber. Accordingly, the initial plasma ignition is not performed in the plasma discharge channel, which reduces particles caused by damage to the inside of the plasma chamber due to an arc discharge that may be generated during the initial plasma ignition. |
