| 摘要 |
A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument is disclosed, where the energetic-beam instrument comprises: a focused ion beam, a stage capable of motion and tilting, a TEM grid held in a fixed holder on the stage, the TEM grid having a plane and the holder mounted in a fixed orientation with respect to the stage, and a probe tip rotatably connected to a nanomanipulator; the sample having a top surface and a backside and a required plane for the TEM sample that is normal to the top surface of the sample, and the sample being attached to the probe tip; the method comprising: rotating the probe tip by an angle calculated according to the geometry of the apparatus; moving the stage to position the TEM grid so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid and removing the attachment of the probe tip to the extracted sample; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling by the focused ion beam to prepare a thinned cross-sectional sample for TEM viewing. |
