发明名称 SELF-ASSEMBLING POLYMERIC MATERIAL, SELF-ASSEMBLED FILM, METHOD FOR PRODUCING SELF-ASSEMBLED FILM, AND IRREGULAR PATTERN
摘要 The purpose of the present invention is to provide: a self-assembling polymeric material whereby it becomes possible to reduce defects formed at microphase separation-insufficient sites and therefore it becomes possible to form a fine repeated pattern; a self-assembled film; a method for producing a self-assembled film; and an irregular pattern. The self-assembling polymeric material according to the present invention is characterized by comprising a polymeric compound which contains both a constituent unit represented by general formula (1) and a constituent unit represented by general formula (2). (In formula (2), X represents a carbon atom or a silicon atom; and p represents an integer of 1 to 5 inclusive.)
申请公布号 WO2016068261(A1) 申请公布日期 2016.05.06
申请号 WO2015JP80616 申请日期 2015.10.29
申请人 HORIBA STEC, CO., LTD. 发明人 TAKEDA, TAKANOBU;KAWAGUCHI, YUKIO
分类号 C08F212/14;B29C59/02;C08F297/02;H01L21/027 主分类号 C08F212/14
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