发明名称 |
SELF-ASSEMBLING POLYMERIC MATERIAL, SELF-ASSEMBLED FILM, METHOD FOR PRODUCING SELF-ASSEMBLED FILM, AND IRREGULAR PATTERN |
摘要 |
The purpose of the present invention is to provide: a self-assembling polymeric material whereby it becomes possible to reduce defects formed at microphase separation-insufficient sites and therefore it becomes possible to form a fine repeated pattern; a self-assembled film; a method for producing a self-assembled film; and an irregular pattern. The self-assembling polymeric material according to the present invention is characterized by comprising a polymeric compound which contains both a constituent unit represented by general formula (1) and a constituent unit represented by general formula (2). (In formula (2), X represents a carbon atom or a silicon atom; and p represents an integer of 1 to 5 inclusive.) |
申请公布号 |
WO2016068261(A1) |
申请公布日期 |
2016.05.06 |
申请号 |
WO2015JP80616 |
申请日期 |
2015.10.29 |
申请人 |
HORIBA STEC, CO., LTD. |
发明人 |
TAKEDA, TAKANOBU;KAWAGUCHI, YUKIO |
分类号 |
C08F212/14;B29C59/02;C08F297/02;H01L21/027 |
主分类号 |
C08F212/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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