发明名称 |
LENGTH METROLOGY APPARATUS AND METHODS FOR SUPPRESSING PHASE NOISE-INDUCED DISTANCE MEASUREMENT ERRORS |
摘要 |
Length metrology apparatuses and methods are disclosed for measuring both specular and non-specular surfaces with high accuracy and precision, and with suppressed phase induced distance errors. In one embodiment, a system includes a laser source exhibiting a first and second laser outputs with optical frequencies that are modulated linearly over large frequency ranges. The system further includes calibration and signal processing portions configured to determine a calibrated distance to at least one sample. |
申请公布号 |
WO2016069894(A1) |
申请公布日期 |
2016.05.06 |
申请号 |
WO2015US58051 |
申请日期 |
2015.10.29 |
申请人 |
BRIDGER PHOTONICS, INC. |
发明人 |
THORPE, MICHAEL;KREITINGER, AARON;REIBEL, RANDY |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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