ION TRAPPING DEVICE WITH INSULATING LAYER EXPOSURE PREVENTION AND METHOD FOR MANUFACTURING SAME

摘要

One embodiment of the present invention provides an ion trapping device and a method for manufacturing same, the ion trapping device comprising: at least one central DC electrode including a DC connection pad provided on a semiconductor substrate, and a DC rail connected to the DC connection pad; an RF electrode including at least one RF rail which is located adjacent to the DC rail, and an RF pad connected to the at least one RF rail; at least one lateral electrode including at least one lateral electrode pad which is positioned on the opposite side of the DC electrode, with the RF electrode at the center; and an insulating layer for supporting at least one of the electrodes from the electrodes on top of the semiconductor substrate, wherein the insulating layer includes a first insulation layer and a second insulation layer positioned above the first insulation layer, and wherein the second insulation layer has an overhang which protrudes beyond the first insulation layer in the widthwise direction.