发明名称 |
ENCODER APPARATUS, DRIVE APPARATUS, STAGE APPARATUS, ROBOT APPARATUS, AND MULTI-ROTATION INFORMATION CALCULATION METHOD |
摘要 |
[Problem] To provide an encoder apparatus capable of obtaining multi-rotation information using a simple structure. [Solution] An encoder apparatus (EC) is provided with a first encoder (1) for detecting the rotational position of a first shaft (AX1), a second encoder (2) for detecting the rotational position of a second shaft (AX2) rotating at a fixed speed ratio in relation to the first shaft (AX1), and a detection unit (4) for carrying out calculation processing on the basis of the rotational position detected by the first encoder (1) and the rotational position detected by the second encoder (2) and detecting multi-rotation information for the first shaft (AX1) on the basis of the calculation results. |
申请公布号 |
WO2016068302(A1) |
申请公布日期 |
2016.05.06 |
申请号 |
WO2015JP80776 |
申请日期 |
2015.10.30 |
申请人 |
NIKON CORPORATION |
发明人 |
SUZUKI, HIROSHI;WATANABE, AKIHIRO |
分类号 |
G01D5/244;B25J19/02 |
主分类号 |
G01D5/244 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|