发明名称 ENCODER APPARATUS, DRIVE APPARATUS, STAGE APPARATUS, ROBOT APPARATUS, AND MULTI-ROTATION INFORMATION CALCULATION METHOD
摘要 [Problem] To provide an encoder apparatus capable of obtaining multi-rotation information using a simple structure. [Solution] An encoder apparatus (EC) is provided with a first encoder (1) for detecting the rotational position of a first shaft (AX1), a second encoder (2) for detecting the rotational position of a second shaft (AX2) rotating at a fixed speed ratio in relation to the first shaft (AX1), and a detection unit (4) for carrying out calculation processing on the basis of the rotational position detected by the first encoder (1) and the rotational position detected by the second encoder (2) and detecting multi-rotation information for the first shaft (AX1) on the basis of the calculation results.
申请公布号 WO2016068302(A1) 申请公布日期 2016.05.06
申请号 WO2015JP80776 申请日期 2015.10.30
申请人 NIKON CORPORATION 发明人 SUZUKI, HIROSHI;WATANABE, AKIHIRO
分类号 G01D5/244;B25J19/02 主分类号 G01D5/244
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