| 发明名称 |
MICROFABRICATED OPTICAL APPARATUS |
| 摘要 |
A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via. |
| 申请公布号 |
US2016126696(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201514931883 |
申请日期 |
2015.11.04 |
| 申请人 |
Innovative Micro Technology |
发明人 |
GUDEMAN Christopher S. |
| 分类号 |
H01S5/022;H04B10/516;G02B27/09;H01S5/026;G02F1/09 |
主分类号 |
H01S5/022 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microfabricated optical apparatus fabricated on a substrate, comprising:
a light source driven by a signal, wherein the light source generates optical radiation; wherein the signal is delivered to the light source by at least one through silicon via (TSV) which extends through a thickness of the substrate. |
| 地址 |
Goleta CA US |
