发明名称 Corrosion Resistant Electrodes for Laser Chambers
摘要 Corrosion resistant electrodes are formed of brass that has been doped with phosphorus, arsenic, antimony, or combinations thereof. The electrodes are formed of brass that contains about 100 ppm to about 1,000 ppm of phosphorus, arsenic, or antimony, and the brass has no visible microporosity at a magnification of 400×. The brass may be cartridge brass that contains about 30 weight percent of zinc and the balance copper. Corrosion resistant electrodes also may be formed by subjecting brass to severe plastic deformation to increase the resistance of the brass to plasma corrosion. The corrosion resistant electrodes can be used in laser systems to generate laser light.
申请公布号 US2016126689(A1) 申请公布日期 2016.05.05
申请号 US201514979073 申请日期 2015.12.22
申请人 Cymer, LLC 发明人 Kardokus Janine;Duffey Thomas P.
分类号 H01S3/038;C22C9/04 主分类号 H01S3/038
代理机构 代理人
主权项 1. An electrode, comprising: a body of the electrode having an elongated surface formed of brass that contains about 100 ppm to about 1,000 ppm of arsenic or antimony, the brass having no visible microporosity at a magnification of 400×, and the brass exhibiting increased resistance to plasma corrosion relative to cartridge brass that has not been doped with arsenic or antimony.
地址 San Diego CA US