DIAGNOSIS SYSTEM FOR PULSED PLASMA

摘要

A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.

主权项

1. A diagnosis system for pulsed plasma, the diagnosis system comprising:
a chamber in which light is to be generated by a reaction between a substrate and the pulsed plasma; a first pulsed RF power supply to provide a first pulsed RF power corresponding to a pulse signal to the chamber; an optical emission sensor (OES) to sense generated light and convert the generated light into an electrical signal; a digitizer to synchronize the electrical signal with the pulse signal; and an analyzer to analyze the synchronized electrical signal.