METHOD OF MOUNTING SUBSTRATE SUPPORT IN CHAMBER, METHOD OF DISMOUNTING SUBSTRATE SUPPORT AND AUXILIARY TRANSPORT TOOL

摘要

A method of mounting a substrate support in a chamber includes placing an auxiliary transfer tool having a first portion and a second portion in a chamber which provides a processing space and an additional space, and which has an opening for communication between the additional space and the outside, the first portion in an expanded state being positioned in the processing space and the second portion being positioned in the additional space, inserting a substrate support having a contact portion for supporting the substrate, a rod portion, and a threaded portion connecting to the rod portion, the rod portion being slid on a side surface of the second portion, shrinking the first portion so that the rod portion is moved downward in the additional space and the threaded portion projects out of the chamber through the opening.

主权项

1. A method of mounting a substrate support in a chamber, comprising:
a setting step of placing an auxiliary transfer tool having a first portion capable of being expanded by being charged with a gas and a second portion connecting to the first portion in a chamber which provides a processing space for processing a substrate and an additional space smaller in width than the processing space, and which has an opening for communication between the additional space and the outside, the first portion in an expanded state being positioned in the processing space, and the second portion being positioned in the additional space; an insertion step of inserting a substrate support having a contact portion for supporting the substrate, a rod portion connecting to the contact portion, and a threaded portion connecting to a distal end of the rod portion, the rod portion of the substrate support being slid on a side surface of the second portion until the contact portion is put on the first portion; a shrinkage step of shrinking the first portion by discharging the gas from the first portion so that the rod portion is moved downward in the additional space and the threaded portion projects out of the chamber through the opening; and a fixing step of fixing the substrate support in the chamber by using the threaded portion.