发明名称 |
CLAMP ASSEMBLY |
摘要 |
A clamp assembly is for clamping an outer peripheral portion of a substrate to a support in a plasma processing chamber. An RF bias power is applied to the support during the plasma processing of the substrate. The clamp assembly includes an outer clamp member, and an inner clamp member which is received by the outer clamp member, the inner clamp member defining an aperture which exposes the substrate to the plasma processing. The outer clamp member has an inner portion terminating in an inner edge, wherein the inner portion is spaced apart from the inner clamp member. |
申请公布号 |
US2016126129(A1) |
申请公布日期 |
2016.05.05 |
申请号 |
US201514925715 |
申请日期 |
2015.10.28 |
申请人 |
SPTS TECHNOLOGIES LIMITED |
发明人 |
BARKER ANTHONY;ASHRAF HUMA;KIERNAN BRIAN |
分类号 |
H01L21/687;H01L21/67;H01L21/3065;H01J37/32 |
主分类号 |
H01L21/687 |
代理机构 |
|
代理人 |
|
主权项 |
1. A clamp assembly for clamping an outer peripheral portion of a substrate to a support in a plasma processing chamber of the type in which an RF bias power is applied to the support during the plasma processing of the substrate, the clamp assembly comprising:
an outer clamp member; and an inner clamp member which is received by the outer clamp member, the inner clamp member defining an aperture which exposes the substrate to the plasma processing; in which the outer clamp member has an inner portion terminating in an inner edge, wherein the inner portion is spaced apart from the inner clamp member. |
地址 |
NEWPORT GB |