| 发明名称 |
BULK ACOUSTIC WAVE RESONATOR COMPRISING A RING |
| 摘要 |
An acoustic resonator includes a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer; a passivation layer disposed over the second electrode and a ring disposed between the substrate and the passivation layer |
| 申请公布号 |
US2016126930(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201414526466 |
申请日期 |
2014.10.28 |
| 申请人 |
Avago Technologies General IP (Singapore) Pte. Ltd. |
发明人 |
Zou Qiang;Burak Dariusz |
| 分类号 |
H03H9/56;H01L41/047 |
主分类号 |
H03H9/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A bulk acoustic wave (RAW) resonator device, comprising:
a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode; a second electrode disposed over the piezoelectric layer; a passivation layer disposed over the second electrode; and a ring disposed in the passivation layer. |
| 地址 |
Singapore SG |
