WARP CORRECTION APPARATUS FOR PLATE-LIKE WORKPIECE AND WARP CORRECTION METHOD

摘要

A warp correction apparatus includes an elastic mat, a first sheet supply unit which supplies a first clean sheet on the elastic mat, a workpiece holding mechanism which supplies the plate-like workpiece (a frame unit) on the first clean sheet, a second sheet supply unit which supplies a second clean sheet above the first clean sheet, a pressure roller, a first elevator unit which moves the second clean sheet up and down, a second elevator unit which presses the pressure roller toward the elastic mat, and a roller moving mechanism. The pressure roller is moved along an upper surface of the elastic mat by the roller moving mechanism while the frame unit is sandwiched between the elastic mat and the pressure roller.

主权项

1. A warp correction apparatus which corrects warping of a plate-like workpiece including a first surface and a second surface, the warp correction apparatus comprising:
an elastic mat including a flat upper surface; a first sheet supply unit configured to supply a first clean sheet on the upper surface of the elastic mat; a workpiece holding mechanism configured to supply the plate-like workpiece on the first clean sheet; a second sheet supply unit configured to supply a second clean sheet above the first clean sheet; a first elevator unit configured to move the second clean sheet up and down relatively with respect to the first clean sheet; a pressure roller which is movable and disposed above the second clean sheet; a second elevator unit configured to press the pressure roller toward the elastic mat; and a roller moving mechanism configured to move the pressure roller along the upper surface of the elastic mat in a state in which the pressure roller is lowered.