| 发明名称 |
ROLL-TYPE PROCESSING MEMBER, PENCIL-TYPE PROCESSING MEMBER, AND SUBSTRATE PROCESSING APPARATUS INCLUDING ANY ONE OF THESE |
| 摘要 |
A roll-type cleaning member for scrubbing and cleaning a target cleaning surface of a substrate includes a plurality of nodules formed on a surface thereof. Each nodule includes a slit which extends so as not to be parallel to the rotation direction of the roll-type cleaning member, upstream edges are formed by the slit so as to serve as edges first contacting the target cleaning surface when a cleaning surface of the nodule contacts the target cleaning surface of the substrate by the rotation of the roll-type cleaning member, and the upstream edges are provided at a plurality of positions of the cleaning surface of the nodule in the circumferential direction. |
| 申请公布号 |
US2016126113(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201514920045 |
申请日期 |
2015.10.22 |
| 申请人 |
EBARA CORPORATION |
发明人 |
ISHIBASHI Tomoatsu |
| 分类号 |
H01L21/67;B08B1/04;B08B3/10;B08B1/00 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A roll-type processing member for processing a surface of a substrate by scrubbing the surface of the substrate, comprising:
a nodule which is formed on a surface of the roll-type processing member, wherein the nodule includes a plurality of upstream edges which are provided in the rotation direction of the roll-type processing member, the plurality of upstream edges being edges located at the upstream sides of a front end surface of the nodule when the front end surface contacts the surface of the substrate by the rotation of the roll-type processing member. |
| 地址 |
Tokyo JP |
