发明名称 Adhesive Sheet, Method for Manufacturing Semiconductor Device Using Same, Method for Manufacturing Thermal Airflow Sensor Using Same, and Thermal Airflow Sensor
摘要 Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy.
申请公布号 US2016126127(A1) 申请公布日期 2016.05.05
申请号 US201414896084 申请日期 2014.04.18
申请人 HITACHI AUTOMOTIVE SYSTEMS, LTD. 发明人 IKEO Satoshi;SAGAWA Toshifumi;DOI Ryosuke;KIKUCHI Hiroshi;MUKUNO Hideki
分类号 H01L21/683;G01F1/692;G01F1/684;C09J7/00;H01L21/78 主分类号 H01L21/683
代理机构 代理人
主权项 1. An adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less, the adhesive sheet being divided to correspond to a shape of the adherend, and adhesion or stickiness being generated or increased by external energy.
地址 Ibaraki JP