METHOD FOR TREATING SURFACE OF RELEASING CHAMBER IN CONTACT WITH TEST OBJECT

摘要

A method for treating surface of releasing chamber in contact with test object comprising the following steps: (1) with regard to components made by processing stainless steel or glass, if the component is stainless steel, the stainless steel component is oxidized with an acid and then washed with an organic solvent and water, or electrolyzed after oxidation and then washed with an organic solvent and water; if the component is glass, the glass component is corroded by HCL or HF, or the surface thereof is roughened by a physical method; and (2) then follows production of a deactivated layer by processing the surface of the component washed in step (1), or first production of an intermediate layer by processing the surface of the component washed in step (1), and then production of a deactivated layer by processing the surface of the intermediate layer.

主权项

1. A method for treating a surface of a releasing chamber in contact with a test object, the releasing chamber comprising the following components: a chamber (1); a chamber door (2), a suction tube (4), an exhaust tube (5) and a sampling tube (6) connected with the chamber (1); a stirring fan (7) mounted in the chamber (1); and
an air duct board (8); the method is used for treating the surface of at least one component of the chamber (1), the chamber door (2), the suction tube (4), the exhaust tube (5), the sampling tube (6), the stirring fan (7) and the air duct board (8) in contact with the test object, characterized in that the following steps are comprised: (1) with regard to the components made by processing stainless steel or glass, first washing each of the components to remove contaminants; and (2) then follows production of a deactivated layer (10) by processing the surface of the component washed in step (1), or first production of an intermediate layer (9) by processing the surface of the component washed in step (1), and then production of the deactivated layer (10) by processing the surface of the intermediate layer (9).