PROCESSING APPARATUS AND PROCESSING METHOD

摘要

According to one embodiment, a processing apparatus includes a container, a processor, a supply unit, a recovery unit, a calculator, and a replenishing liquid supply unit. The container contains buffered hydrogen fluoride. The processor performs processing of a processing object using the buffered hydrogen fluoride. The supply unit supplies the buffered hydrogen fluoride to the processor. The buffered hydrogen fluoride is contained in the container. The recovery unit recovers the buffered hydrogen fluoride used in the processor and supplies the recovered buffered hydrogen fluoride to the container. The calculator calculates an evaporation amount of the buffered hydrogen fluoride. The replenishing liquid supply unit supplies the same amount of a replenishing liquid as the calculated evaporation amount of the buffered hydrogen fluoride to the buffered hydrogen fluoride. The replenishing liquid includes ammonia and water.

主权项

1. A processing apparatus, comprising:
a container containing buffered hydrogen fluoride; a processor performing processing of a processing object using the buffered hydrogen fluoride; a supply unit supplying, to the processor, the buffered hydrogen fluoride contained in the container; a recovery unit recovering the buffered hydrogen fluoride used in the processor and supplying the recovered buffered hydrogen fluoride to the container; a calculator calculating an evaporation amount of the buffered hydrogen fluoride; and a replenishing liquid supply unit supplying, to the buffered hydrogen fluoride, the same amount of a replenishing liquid as the calculated evaporation amount of the buffered hydrogen fluoride, the replenishing liquid including ammonia and water.