发明名称 |
SUBSTRATE MACHINING APPARATUS |
摘要 |
Provided is a substrate machining apparatus which rarely forms flaws on a brittle material substrate. The substrate machining apparatus comprises: a belt (11) conveying a brittle material substrate (300); and a clamping device (40) which clamps the brittle material substrate (300) laid on the belt (11). The belt (11) and the clamping device (40) are connected. |
申请公布号 |
KR20160048631(A) |
申请公布日期 |
2016.05.04 |
申请号 |
KR20150083706 |
申请日期 |
2015.06.12 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
TOKUNAGA NAO |
分类号 |
C03B33/02;C03B33/033 |
主分类号 |
C03B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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