| 摘要 |
An electrically heated radiant burner 8 is used for treating an effluent gas stream from a manufacturing processing tool. The burner has a porous sleeve defining a plenum 22, the sleeve at least partially defining a treatment chamber 14 and through which treatment materials pass for introduction into the treatment chamber. An electrical energy device 50 is coupled with the porous sleeve and in use, provides electrically powered heat energy to heat the porous sleeve and heat the treatment materials as they pass through the porous sleeve into the treatment chamber. The electric heater may heat by induction, resistive or microwave heating, and in this way, electrical energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This provides for greater flexibility in the use of such burners since the burner can be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable, and enables significantly more energy to be imparted into the treatment materials as they transit through the porous sleeve. |
