| 摘要 |
The disclosed method of manufacturing carbon nanotubes includes the steps of growing CNTs on a substrate 12 and cleaning the inside of a growth furnace 13 by supplying a cleaning gas that contains water into the growth furnace 13. In the cleaning step, the cleaning is performed such that 0.7 ‰¤ (2[CO 2 ] + [CO])/[H 2 ] ‰¤ 1.3 is satisfied, where [H 2 ], [CO 2 ], and [CO] denote the concentrations of hydrogen, carbon dioxide, and carbon monoxide, respectively, in a gas within the growth furnace 13. |
