发明名称 |
SPIN-ON COMPOSITIONS OF SOLUBLE METAL OXIDE CARBOXYLATES AND METHODS OF THEIR USE |
摘要 |
The present disclosure relates to spin-on compositions containing at least one metal oxide dicarboxylate and an organic solvent into which the metal oxide dicarboxylate is soluble or colloidally stable. The dicarboxylate is capable of decomposing during heat treatment to give a cured metal oxide film. The present disclosure also relates to method of using the spin-on compositions. |
申请公布号 |
EP3014358(A1) |
申请公布日期 |
2016.05.04 |
申请号 |
EP20140735520 |
申请日期 |
2014.06.26 |
申请人 |
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À.R.L. |
发明人 |
RAHMAN, M. DALIL;CHADA, VENKATA GOPAL REDDY;YAO, HUIRONG;ANYADIEGWU, CLEMENT;MCKENZIE, DOUGLAS |
分类号 |
C23C18/08;C23C18/06;C23C18/12;C23C18/14;G03F7/09;H01L21/027 |
主分类号 |
C23C18/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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