DISCHARGE SCAN APPARATUS FOR LARGE AREA AND METHOD FOR FABRICATION OF PATTERN USING THE SAME

摘要

The present invention provides a discharge scan apparatus for a large area, which comprises: a scan unit having a terminal which has a square surface so as to perform a large area discharge process; a discharge plate which is in a grounded state; and an output unit to apply an output of 0.03 kW to 1.0 kW to the scan unit and the discharge plate. According to the present invention, the discharge scan apparatus for a large area can form a desired pattern by uniformly performing a discharge process on a large area. Moreover, according to the present invention, a method for forming a pattern using the discharge scan apparatus for a large area can form a normal pattern, a layered structure pattern, a pattern having a gradient, or the like. The present invention is an improved method available to industry compared to the prior art to form a surface structure in an experimental unit by using a metal wire.