发明名称 |
SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENTS, SEMICONDUCTOR LIGHT EMITTING ELEMENT, METHOD FOR PRODUCING SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENTS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING ELEMENT |
摘要 |
A method of manufacturing a semiconductor light emitting device, the method including: a particle arranging step for arranging a plurality of particles M in a monolayer on a substrate S, a particle etching step for dry etching the plurality of particles M arranged to provide a void between the particles M in a condition by which the particles M are etched while the substrate S is not etched substantially; and a substrate etching step for dry etching the substrate S by using the plurality of particles M after the particle etching step as an etching mask, thereby forming an uneven structure on one surface X the substrate S. |
申请公布号 |
EP2889922(A4) |
申请公布日期 |
2016.05.04 |
申请号 |
EP20130830839 |
申请日期 |
2013.08.21 |
申请人 |
OJI HOLDINGS CORPORATION |
发明人 |
HATTA YOSHIHISA;SHINOTSUKA KEI;DAI KOTARO;KAJITA YASUHITO |
分类号 |
H01L33/20;H01L21/02;H01L21/308;H01L33/00 |
主分类号 |
H01L33/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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