发明名称 |
SPECTRAL PURITY FILTER |
摘要 |
A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy. |
申请公布号 |
EP2534537(B1) |
申请公布日期 |
2016.05.04 |
申请号 |
EP20100788073 |
申请日期 |
2010.12.08 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
YAKUNIN, ANDREI;KRIVTSUN, VLADIMIR;MEDVEDEV, VIACHESLAV;KODENTSOV, ALEXANDRE |
分类号 |
G03F7/20;G02B5/20;G02B15/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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