| 发明名称 |
PRINTED CHEMICAL MECHANICAL POLISHING PAD |
| 摘要 |
A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material. |
| 申请公布号 |
EP2842157(A4) |
申请公布日期 |
2016.05.04 |
| 申请号 |
EP20130782401 |
申请日期 |
2013.04.05 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BAJAJ, RAJEEV;CHIN, BARRY, LEE;LEE, TERRANCE, Y. |
| 分类号 |
H01L21/304;B24B37/04;B24B37/26;B24D18/00;B29C67/00;B29K75/00;B29K509/02 |
主分类号 |
H01L21/304 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
