| 发明名称 |
METHOD FOR PRODUCING TRISILYLAMINE FROM CHLOROSILANE AND AMMONIA USING AN INERT SOLVENT |
| 摘要 |
The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage. |
| 申请公布号 |
EP2791146(B1) |
申请公布日期 |
2016.05.04 |
| 申请号 |
EP20120783208 |
申请日期 |
2012.11.06 |
| 申请人 |
EVONIK DEGUSSA GMBH |
发明人 |
HOPPE, CARL-FRIEDRICH;RAUDELER, HARTWIG;GÖTZ, CHRISTIAN |
| 分类号 |
C07F7/02;B01D3/00;B01D3/14;B01J8/00;B01J19/00;B01J19/24;C01B21/087;C01B33/00 |
主分类号 |
C07F7/02 |
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