发明名称 Support for a component of an optical device including a locking device
摘要 The disclosure provides an arrangement for an optical device including a component of the optical device and a support structure supporting the component. The support structure includes at least one locking device connected to the component and including a first fixation device and an associated second fixation device. The first fixation device and the second fixation device are adapted to be, in a movable state, movable with respect to each other along a first degree of freedom and a second degree of freedom into a final position. The first fixation device and the second fixation device are further adapted to be, in a locked state, fixed in the final position by at least one locking device contacting the first fixation device and the second fixation device. In the movable state, the first fixation device and the second fixation device are movable, up to the final position, in a manner free from a mutual pre-stress resulting from a restoring force exerted by at least a part of one of the first fixation device and the second fixation device.
申请公布号 US9329499(B2) 申请公布日期 2016.05.03
申请号 US200912569262 申请日期 2009.09.29
申请人 Carl Zeiss SMT GmbH 发明人 Bischoff Thomas;Feucht Joachim;Wieland Jochen;Mueller Stefan
分类号 G03F7/20;G02B7/02 主分类号 G03F7/20
代理机构 Fish & Richardson P.C. 代理人 Fish & Richardson P.C.
主权项 1. An arrangement, comprising: a component of an optical device; a support structure supporting the component; and at least one locking device connected to the component and the support structure, the at least one locking device comprising an elongated first fixation element, a block-shaped second fixation element, and a block-shaped third fixation element, wherein: the first fixation element protrudes into a first recess of the second fixation element;the second fixation element is received in a second recess of the third fixation element;the first fixation element, the second fixation element and the third fixation element are adapted to be, in a movable state, movable with respect to each other along a first degree of freedom and a second degree of freedom into a final position;the first fixation element, the second fixation element and the third fixation element are adapted to be, in a locked state, fixed in the final position by at least one locking member; andin the movable state, the first fixation element is fixedly connected to a first member selected from the member group consisting of the component and the support structure and the third fixation element is fixedly connected to a second member selected from the member group, the second member being different from the first member.
地址 Oberkochen DE
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