Thrust ripple mapping system in a precision stage and method thereof

摘要

The present invention proposes a thrust ripple mapping system in a precision stage with the thrust ripple mapping system comprising a moving stage, a load cell, a plurality of motors and a processing component. The load cell is coupled to the moving stage. The motors are employed in moving the load cell and the moving stage. The processing component takes a thrust force measurement at each of a plurality of moving increments of the load cell.

主权项

1. A thrust ripple mapping system in a precision stage, the thrust ripple induced by at least one motor and the thrust ripple mapping system comprising:
a moving stage; a load cell coupled to the moving stage; at least one motor employed in moving the load cell and the moving stage; and a processing component taking a thrust force measurement in each of a plurality of moving increments within a moving distance of the load cell; wherein the moving stage is a two-axis precision stage; and wherein the processing component takes the thrust force measurement in each of the moving increments by restricting motion of the moving stage in at least one of a vertical direction and a horizontal direction.