Method for structuring a flat substrate composed of glass-type material, and optical component

摘要

The invention is a method for structuring a flat substrate composed of glass material in the course of a viscous flow process. The glass flat substrate is joined to a surface of a flat substrate, which is preferably a semiconductor flat substrate, having at least one depression bounded by a circumferential edge located in the surface. In the course of a subsequent tempering process, glass material is changed to a viscous free-flowing state in which at least proportions of the free-flowing glass material of the flat substrate flow over the circumferential edge into the depression in the flat substrate. The invention is also characterized in that a flat substrate is provided of which the at least one depression has at least one wetting surface that is countersunk with respect to the surface of the flat substrate and is at least partly bounded by a line-type edge which, at the same time, is an edge of a trench structure provided within the depression and countersunk with respect to the wetting surface and/or is determined by a discontinuous change in a wetting property for the free-flowing glass material that can be assigned to the wetting surface.

主权项

1. A method for structuring a flat substrate comprising a glass material during a viscous flow process in which a glass flat substrate is joined to a surface of another flat substrate which has at least one depression bounded by a circumferential edge located in the surface and during a subsequent tempering process in which the glass material is changed to a viscous free-flowing state in which at least proportions of the free-flowing glass material of the glass flat substrate flows over the circumferential edge into the depression in the other flat substrate, comprising:
providing the other flat substrate so that in at least one depression at least one wetting surface is present that is countersunk with respect to the surface of the other flat substrate and is at least partly bounded by another edge which, at the same time, is an edge of a trench provided within the depression and countersunk with respect to the wetting surface; carrying out the tempering process so that the free-flowing glass material of the glass flat substrate is brought into contact with the wetting surface so that a wetting front forms along the another edge; and ending the tempering process after the formation of a surface of the glass material, which extends between the wetting front and the circumferential edge without contact with the other flat substrate and that encloses a cavity within a sub-region of the depression.